SANTA CLARA, Calif.–Japan's Canon Inc. has thrown its hat into the immersion lithography ring, disclosing a pair of 193-nm tools for use in processing next-generation chips. Canon has retrofitted its ...
SAN JOSE — During the Bacus Symposium on Photomask Technology next week in Monterey, Calif., Japan's Canon Inc. will present a paper on what the company calls a “vortex mask” for use in sub-micron ...
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